Operating power supply voltage:8V to 15V
Port size:5.08 mm
Shell material:Silicon
Plage de mesures:0~300 L/min
Sortie:Résistance à la compression
Précision:± 3% F.S.
Taux de débit de masse:0 - 1000 m2
Précision:± 2 + 0,5 fs) %
Temps de réponse:8 msec
Tension d'alimentation:40,75 à 5,25 V
Niveau élevé:4VDD
De bas niveau:0.8V
Output mode:Analog voltage (0.5 - 4.5VDC)
Interface type:M5 screw hole or JST electrical interface
Repeatability:±1.0%
Measuring Range:0 to 100%
Working Pressure:±100 mbar
Operating Temperature Range:15 to 40°C
Flow Range:0–15 SLPM
Accuracy:±(1.5% of reading + 0.5% of full scale)
Repeatability:±0.5% of full scale
Flow Range:0 - 2000 sccm
Accuracy:±(2.0 + 0.5FS)%
Range Ratio:100:1
Measurement Range:0–2 SLPM (Standard Liter per Minute)
Accuracy:±(1.5% + 0.2% F.S.)
Repeatability:±0.25%
Measurement Range:0–50 SLPM
Accuracy:±(2.0% + 0.5% F.S.)
Repeatability:±0.75%
Measurement Range:0–500 SLPM
Accuracy:±1.5% of Full Scale (F.S.)
Repeatability:±0.75%
Measurement Range:0 - 800 SLPM
Accuracy Grade:1.5% F.S
Nominal Diameter:19mm